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Lam Research Corporation

Products/Services


Products:

  • Exelan dielectric etch systems
  • Exelan HPT
  • 2300 Exelan
  • 2300 Exelan flex
  • 2300 Versys conductor etch systems
  • 2300 Versys star silicon etch system
  • 2300 Versys kiyo
  • Conductor etch systems
  • TCP 9400dfm
  • TCP 9400dsie
  • TCP 9600dfm
  • 2300 motif post-lithography pattern enhancement system
  • 2300 coronus plasma-based bevel clean system
  • C3 (confined chemical cleaning) technology

Services:

  • ValuePoint services
  • MyLam customer extranet
  • Spares
  • Support
  • Refurbished systems
  • Product training