Using, we believe, equipment from Cambridge Instruments Plc, IBM says it has proved a technique for etching multiple layers of integrated circuits with X-rays, and says the technique will eventually enable it to fabricate 64M-bit memory chips.
Using, we believe, equipment from Cambridge Instruments Plc, IBM says it has proved a technique for etching multiple layers of integrated circuits with X-rays, and says the technique will eventually enable it to fabricate 64M-bit memory chips.