Xerox Corp has formed StepperVision Inc in Mountain View, California to offer a monitoring device that specifies optimal settings for wafer steppers used in semiconductor production. The Stepper Image Monitor incorporates basic technology cov-ered by a pending Xerox patent and is the only known device to provide direct measurement of stepper performance and is claimed […]
Xerox Corp has formed StepperVision Inc in Mountain View, California to offer a monitoring device that specifies optimal settings for wafer steppers used in semiconductor production. The Stepper Image Monitor incorporates basic technology cov-ered by a pending Xerox patent and is the only known device to provide direct measurement of stepper performance and is claimed to improve productivity by a factor of 10.
